Based on the architecture proposal beside we intend to develop the following modules:

• Data Collection
• Statistical Process Control (SPC)
• Univariate based Fault Detection (offline and line FDC)
• Chamber (machine part) / tool (complete machine) Matching / Comparison
• Strategic Decision Engine
• Run-to-Run Process Stabilization (R2R)
• Multiway Multivariate Data Analysis (MVA)
• Virtual Metrology